电子元件与材料2025，Vol.44Issue(6)：655-661,7.DOI:10.14106/j.cnki.1001-2028.2025.1521
CaO-La2O3-B2O3系LTCC基板材料研究
Research on LTCC substrate materials based on CaO-La2O3-B2O3 system
摘要
Abstract
LTCC composite ceramics of the CaO-La2O3-B2O3/Al2O3 system were fabricated by co-firing glass and ceramic powders.The crystal structure,microstructure,sintering densification process,and dielectric properties of the composite were characterized and analyzed utilizing X-ray diffraction(XRD),scanning electron microscopy(SEM),differential thermal analysis(DTA),and electrical performance testing methods.Experimental results demonstrate that,during the sintering process,the CaO-La2O3-B2O3 glass crystallized into LaBO3phase,and formed CaAl2B2O7 phase by reacting with Al2O3 via solid-state reaction.The ΔT of the glass can be enlarged by increasing the CaO content in the glass and reducing the glass particle size,thereby expanding the sintering window and achieving optimal comprehensive performance for the composite ceramic.At the CaO content of 15％and particle size of 2.5 μm in the CaO-La2O3-B2O3 system,the maximum density can be achieved by co-firing with 55％Al2O3 at 850℃.The composite ceramic exhibits a desirable dielectric constant of 7.0(20 GHz),dielectric loss of＜0.0009(20 GHz),and flexural strength of＞240 MPa.The LTCC green tapes were prepared by tape casting and co-fired with a silver conductor.A warpage of the substrate was ≤ 3‰,meeting the application requirements for the LTCC substrate materials in terms of basic ceramic properties and compatibility with co-firing of silver conductor.关键词
CaO-La2O3-B2O3/LTCC/基板/玻璃/共烧Key words
CaO-La2O3-B2O3/LTCC/substrate/glass/co-firing分类
通用工业技术引用本文复制引用
吕洋,马涛,沐方清,兰耀海,周万丰..CaO-La2O3-B2O3系LTCC基板材料研究[J].电子元件与材料,2025,44(6):655-661,7.基金项目
安徽省科技攻坚计划项目(202423i08050005) （202423i08050005）
