电子元件与材料2025，Vol.44Issue(7)：788-796,9.DOI:10.14106/j.cnki.1001-2028.2025.0270
光纤法珀压力传感用HTCC膜片制造工艺优化及测试
Optimization of manufacturing process and performance verification of Fabry-Perot cavity high temperature pulsating pressure sensor based on HTCC materials
王飞 1周万丰 1徐向聪 2刘显明2
作者信息
- 1. 中国电子科技集团公司第四十三研究所,安徽 合肥 230088
- 2. 重庆大学光电工程学院,重庆 401331
- 折叠
摘要
Abstract
In view of the manufacturing requirements for sensor diaphragms used in high-temperature environments,this paper proposed a precision manufacturing process for diaphragms based on alumina-based high-temperature co-fired ceramic(HTCC)materials.Through material performance analysis and process optimization,the key parameters of tape casting,lamination and cavity punching,warm isostatic pressing,and high-temperature sintering were determined—thereby reducing the surface roughness and enhancing the reflective performance of traditional HTCC diaphragms.Further integrating polishing and laser processing technologies,HTCC diaphragms with a diameter of 2.51 mm,a thickness of 0.60 mm,high flatness,and high reflectivity were successfully fabricated.Experimental results show that the diaphragm exhibits a pressure sensitivity of 1.806 nm/MPa,a local oscillator frequency exceeding 500 kHz,and a high-temperature resistance of up to 800 ℃,along with excellent dynamic response performance and high-temperature stability.This research lays a process foundation for the application of HTCC materials in the field of high-temperature pressure sensing.关键词
HTCC膜片/膜片制造工艺/流延成型/陶瓷烧结/压力传感Key words
HTCC diaphragm/diaphragm manufacturing process/tape casting/ceramic sintering/pressure sensing引用本文复制引用
王飞,周万丰,徐向聪,刘显明..光纤法珀压力传感用HTCC膜片制造工艺优化及测试[J].电子元件与材料,2025,44(7):788-796,9.
