电子与封装2025，Vol.25Issue(11)：3-8,6.DOI:10.16257/j.cnki.1681-1070.2025.0174
一种耐高温MEMS加速度传感器
High-Temperature MEMS Acceleration Sensor
张旭辉 1李明昊 2任臣 1陈琳 2杨拥军3
作者信息
- 1. 河北美泰电子科技有限公司,石家庄 050051
- 2. 中国电子科技集团公司第十三研究所,石家庄 050051
- 3. 河北美泰电子科技有限公司,石家庄 050051||中国电子科技集团公司第十三研究所,石家庄 050051
- 折叠
摘要
Abstract
A high-temperature micro-electro-mechanical system(MEMS)acceleration sensor is designed.The MEMS sensing structure employs a differential comb capacitance detection principle,and both the MEMS and the application-specific integrated circuit(ASIC)are designed and manufactured using silicon-on-insulator(SOI)technology.The ASIC includes signal chain circuit units such as a low-noise front-end amplifier,gain/zero-point adjustment,and low-pass filter,as well as auxiliary circuit units such as an on-chip reference,on-chip oscillator,and fuse-type one-time programmable(OTP).The device is packaged in a ceramic housing,achieving a measurement range of±15g,a nonlinearity of 0.31％,and a zero-bias stability better than 0.002g at 225 ℃,exhibiting good temperature characteristics and high stability.关键词
MEMS/SOI/高温电路/加速度计/传感器Key words
MEMS/SOI/high-temperature circuit/accelerometer/sensor分类
信息技术与安全科学引用本文复制引用
张旭辉,李明昊,任臣,陈琳,杨拥军..一种耐高温MEMS加速度传感器[J].电子与封装,2025,25(11):3-8,6.
