电子与封装2025，Vol.25Issue(11)：9-19,11.DOI:10.16257/j.cnki.1681-1070.2025.0176
MEMS器件辐射损伤机理与抗辐射加固技术研究进展
Advances in Radiation Damage Mechanisms and Radiation-Hardening Technologies for MEMS Devices
摘要
Abstract
With the widespread application of MEMS technology in extreme radiation environments such as space exploration and nuclear engineering,the issue of radiation reliability has become increasingly prominent.The failure mechanisms of MEMS devices based on different working principles(electrostatic actuation,piezoresistive sensing,piezoelectric conversion,etc.)under radiation environments are systematically analyzed,with particular focus on the effects of ionizing radiation and displacement damage on device performance.A comprehensive review is presented on recent advances in radiation-hardening technologies,encompassing material optimization,structural design,and process improvements.Furthermore,addressing future application requirements in deep-space exploration and nuclear reactor monitoring,the development trends and research directions for radiation-hardened MEMS are proposed,providing valuable insights for the design and application of highly reliable MEMS devices.关键词
MEMS/极端辐射环境/辐射损伤机理/抗辐射加固技术/可靠性设计Key words
MEMS/extreme radiation environment/radiation damage mechanism/radiation-hardening technology/reliability design分类
信息技术与安全科学引用本文复制引用
郭凯茜,朱志成,徐东航,聂萌..MEMS器件辐射损伤机理与抗辐射加固技术研究进展[J].电子与封装,2025,25(11):9-19,11.基金项目
江苏省科技计划重点项目(BK20243023) （BK20243023）
国家自然科学基金(62274031) （62274031）
