电子与封装2026，Vol.26Issue(5)：7-12,6.DOI:10.16257/j.cnki.1681-1070.2026.0051
HTCC腔体成型工艺改善研究
Study on the Improvement of HTCC Cavity Molding Process
张勇 1高彩晋 1杨兴宇 1任耀华1
作者信息
- 1. 中国电子科技集团公司第二研究所,太原 030024
- 折叠
摘要
Abstract
To address the common issue of deformation in high-temperature co-fired ceramic(HTCC)cavities during the molding process,a combined method featuring"stepwise pre-pressing followed by assembly lamination"and a"retracted polyethylene terephthalate(PET)film"technique is proposed.This approach provides a universal solution for improving cavity performance when dealing with forming challenges associated with various cavity structures.At the same time,the pre-pressing pressure and retraction distance are optimized,effectively mastering the cavity manufacturing process technology and ensuring molding quality.Consequently,the cavity surface flatness is controlled within 20 μm.The products fabricated using this method meet the requirements of reliability verification,which provides a valuable reference for cavity molding.关键词
HTCC/腔体成型/预压/内缩PET膜Key words
HTCC/cavity molding/pre-pressing/retracted PET film分类
信息技术与安全科学引用本文复制引用
张勇,高彩晋,杨兴宇,任耀华..HTCC腔体成型工艺改善研究[J].电子与封装,2026,26(5):7-12,6.
