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混合集成电路用AlN-AMB基板电容焊接可靠性研究

董晓伟 董布克 王睿 赵斯阳

电子与封装2026,Vol.26Issue(6):1-7,7.
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电子与封装2026,Vol.26Issue(6):1-7,7.DOI:10.16257/j.cnki.1681-1070.2026.0067

混合集成电路用AlN-AMB基板电容焊接可靠性研究

Soldering Reliability of Capacitors on AlN-AMB Substrates for Hybrid Integrated Circuits

董晓伟 1董布克 2王睿 2赵斯阳2

作者信息

  • 1. 中国电子科技集团公司第四十三研究所,合肥 230088||安徽省微系统重点实验室,合肥 230088
  • 2. 中国电子科技集团公司第四十三研究所,合肥 230088
  • 折叠

摘要

Abstract

Based on the finite element simulation method,a thermo-mechanical coupling model is established to systematically investigate the influence of ceramic substrate material,pad geometric parameters,conductor layout pattern,distribution of copper-clad regions,and ceramic substrate thickness on the root stress of the soldered capacitor.The research results indicate that,compared with the Al2O3 direct-bonded copper(Al2O3-DBC)substrate,the larger coefficient of thermal expansion(CTE)mismatch between the AlN ceramic and the BaTiO3 capacitor is the key factor leading to a 56.8%increase in the root stress of the capacitor soldered on the AlN active-metal-brazed copper(AlN-AMB)substrate.By optimizing the pad dimensions of the capacitor,the root stress of the capacitor is reduced by 40.5%.Moreover,through the rational layout of conductor traces and the positional relationship of copper-clad regions,the stress at the capacitor root is effectively mitigated.The revealed influence laws of stress and the proposed optimization design method provide theoretical support for the design of AlN-AMB substrates for high-reliability hybrid integrated circuits.

关键词

热机械应力/有限元分析/可靠性优化

Key words

thermo-mechanical stress/finite element analysis/reliability optimization

分类

信息技术与安全科学

引用本文复制引用

董晓伟,董布克,王睿,赵斯阳..混合集成电路用AlN-AMB基板电容焊接可靠性研究[J].电子与封装,2026,26(6):1-7,7.

基金项目

安徽省科技创新攻坚计划(202423i08050002) (202423i08050002)

电子与封装

1681-1070

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