Frequency stability of an RF oscillator with an MEMS-based encapsulated resonatorOACSCDCSTPCD

作者：Peng Bohua;Luo Wei;Zhao Jicong;Yuan Quan;Yang Jinling;Yang Fuhua

作者单位：Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,ChinaState Key Laboratory of Transducer Technology,Shanghai 200050,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,ChinaState Key Laboratory of Transducer Technology,Shanghai 200050,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,ChinaState Key Laboratory of Transducer Technology,Shanghai 200050,China

中文关键词：MEMSdisk resonatoroscillatorphase noisefrequency stabilityencapsulation

英文关键词：MEMSdisk resonatoroscillatorphase noisefrequency stabilityencapsulation

刊名：《半导体学报（英文版）》 2015 (7)

相关项目：基于机械耦合谐振器的MEMS超窄带滤波器研究

页码/页数：103-107,5

基金：Project supported by the National Natural Science Foundation of China (Nos.61234007,61404136) and the State Key Development Program for Basic Research of China (Nos.2011CB933102,2013YQ16055103).

DOI：10.1088/1674-4926/36/7/074010