类金刚石薄膜在硅基底上的沉积及其热导率∗OA北大核心CSCDCSTPCD
Dep osition and thermal conductivity of diamond-like carb on film on a silicon substrate
Diamond-Like Carbon (DLC) is thought to be a potential material in solving heat dissipation problems in light emitting diode module packages. It is of vital importance in evaluating the thermal conductivity of DLC film deposited on a silicon substrate. In this paper, the molecular dynamics method is used to simulate the formation of a DLC film by the deposition of carbon atoms on a isilicon substrate. Tersoff potential is adopted to reproduce the structures …查看全部>>
艾立强;张相雄;陈民;熊大曦
清华大学工程力学系，北京 100084中国科学院苏州生物医学工程技术研究所，江苏省医用光学重点实验室，苏州 215163清华大学工程力学系，北京 100084中国科学院苏州生物医学工程技术研究所，江苏省医用光学重点实验室，苏州 215163
类金刚石薄膜化学气相沉积热导率分子动力学模拟
diamond like carbon filmchemical depositionthermal conductivitymolecular dynamics
《物理学报》 2016 (9)
用于大功率紫外LED散热的类金刚石薄膜热传导特性研究
096501-0-096501-7,8
国家自然科学基金(批准号:51376191,51321002)资助的课题
评论