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无驱动冗余的纯中心压电黏滑旋转台

马世坤 杨依领 吴高华 崔玉国 魏燕定

机器人2024,Vol.46Issue(3):257-265,9.
机器人2024,Vol.46Issue(3):257-265,9.DOI:10.13973/j.cnki.robot.230056

无驱动冗余的纯中心压电黏滑旋转台

Purely Central Piezoelectric Stick-slip Rotary Stage without Driving Redundancy

马世坤 1杨依领 1吴高华 1崔玉国 1魏燕定2

作者信息

  • 1. 宁波大学机械工程与力学学院浙江省零件轧制成形技术研究重点实验室,浙江宁波 315211
  • 2. 浙江大学机械工程学院浙江省先进制造技术重点实验室,浙江杭州 310027
  • 折叠

摘要

Abstract

Given the performance requirements of large rotation angle,high resolution,high load capacity,and compact structure in precision posture adjustment,a purely central stick-slip rotary stage with force magnification characteristics is designed using a piezoelectric actuator to drive compliant mechanisms.Actuation redundancy is avoided by single-actuator driving,meanwhile the clamping force magnification characteristics can be regulated by changing the tilt angle of the bridge driving mechanism.Firstly,compliant mechanisms with hybrid straight circular and leaf-type flexible hinges are used to design a bridge mechanism containing a pair of centrosymmetric driving feet,which are combined with a circular slide to achieve non-redundant,purely central rotation while magnifying the clamping force.Then,the single-step rotation angle,force magnification,and stress of the rotary stage are analyzed by finite element simulation and compared with the theoretical calculation.Finally,an experimental test platform is built to verify the performance of the designed rotary stage.The overall size of the rotary stage is 86 mm×86 mm×32 mm,and the maximum load in experiments is 9 kg with a 150 V input voltage.Also,the angular resolution is 0.10 μrad.

关键词

压电驱动/柔顺机构/黏滑运动/旋转台

Key words

piezoelectric actuation/compliant mechanism/stick-slip motion/rotary stage

引用本文复制引用

马世坤,杨依领,吴高华,崔玉国,魏燕定..无驱动冗余的纯中心压电黏滑旋转台[J].机器人,2024,46(3):257-265,9.

基金项目

浙江省自然科学基金(LY22E050002) (LY22E050002)

国家自然科学基金(51805276,51975517). (51805276,51975517)

机器人

OA北大核心CSTPCD

1002-0446

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